JPH0750685Y2 - 静電容量式荷重センサー - Google Patents
静電容量式荷重センサーInfo
- Publication number
- JPH0750685Y2 JPH0750685Y2 JP1987175732U JP17573287U JPH0750685Y2 JP H0750685 Y2 JPH0750685 Y2 JP H0750685Y2 JP 1987175732 U JP1987175732 U JP 1987175732U JP 17573287 U JP17573287 U JP 17573287U JP H0750685 Y2 JPH0750685 Y2 JP H0750685Y2
- Authority
- JP
- Japan
- Prior art keywords
- movable electrode
- fixed electrode
- electrode
- load sensor
- metal plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 16
- 125000006850 spacer group Chemical group 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 5
- 238000007639 printing Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987175732U JPH0750685Y2 (ja) | 1987-11-19 | 1987-11-19 | 静電容量式荷重センサー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987175732U JPH0750685Y2 (ja) | 1987-11-19 | 1987-11-19 | 静電容量式荷重センサー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0181545U JPH0181545U (en]) | 1989-05-31 |
| JPH0750685Y2 true JPH0750685Y2 (ja) | 1995-11-15 |
Family
ID=31467514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987175732U Expired - Lifetime JPH0750685Y2 (ja) | 1987-11-19 | 1987-11-19 | 静電容量式荷重センサー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0750685Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3380997B2 (ja) * | 1999-09-17 | 2003-02-24 | ニッタ株式会社 | 静電容量式センサ |
| JP6320485B2 (ja) * | 2016-10-28 | 2018-05-09 | ミネベアミツミ株式会社 | キャスター |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE412956B (sv) * | 1974-04-04 | 1980-03-24 | Rosemount Inc | Kapacitiv avkenningsanordning |
| US4295376A (en) * | 1978-12-01 | 1981-10-20 | Besco Industries, Inc. | Force responsive transducer |
| DE2938205A1 (de) * | 1979-09-21 | 1981-04-09 | Robert Bosch Gmbh, 7000 Stuttgart | Kapazitiver druckgeber und auswerteeinrichtung hierfuer |
-
1987
- 1987-11-19 JP JP1987175732U patent/JPH0750685Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0181545U (en]) | 1989-05-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6588281B2 (en) | Double stop structure for a pressure transducer | |
| JP2547374Y2 (ja) | 圧力センサ | |
| JP2918272B2 (ja) | 線形応答性を有する容量型センサ及び線形応答性を得るための方法 | |
| US4445384A (en) | Piezoelectric pressure sensor | |
| JPS6034687B2 (ja) | 圧力電子変換素子 | |
| JPS60195829A (ja) | 静電容量形絶対圧力検出器 | |
| JPH0583854B2 (en]) | ||
| JP3399688B2 (ja) | 圧力センサ | |
| JPH0750685Y2 (ja) | 静電容量式荷重センサー | |
| JPH0743625Y2 (ja) | 静電容量式荷重センサ | |
| JP2001281075A (ja) | 静電容量型荷重センサー | |
| JP2004226294A (ja) | 静圧動圧検知センサ | |
| JP2001074569A (ja) | 平板型静電容量式捩り歪みセンサ | |
| JP3293533B2 (ja) | 歪み検出素子 | |
| JP3287287B2 (ja) | 歪み検出素子及びその製造方法 | |
| JPH0626823Y2 (ja) | 静電容量による荷重センサ | |
| JP3083115B2 (ja) | 静電容量型圧力センサ素子 | |
| JP2003106919A (ja) | 静圧動圧検知センサ | |
| JP2004132882A (ja) | 静圧動圧検知センサ | |
| JP2002296131A (ja) | 静圧動圧検知センサ | |
| JPS58164271A (ja) | Ｍｉｓ型圧力センサ | |
| JP2631299B2 (ja) | 重量検出装置 | |
| JPS5838972Y2 (ja) | 圧電スイッチ | |
| JPH11248574A (ja) | 圧力センサ | |
| JP2643906B2 (ja) | 圧力センサ |